CVD Oven

PEO601 from ATV Technology, Munich
Specifications:

Capacity: max. 40 4” wafer
Heating system: IR-lamps (furnace with inconel-coating) up to 1000°C continuous operation
Ramping up to ~80°C/min on heating and cooling
Process gas delivery controlled by rotameter or MFC, optional vacuum operation
bubbler-system for steam oxidation

PEO603 from ATV Technology, Munich
Specifications:

Capacity: max. 45 6” wafer
Heating system: 12 resistance heating rods, up to 1100°C continuous operation
Ramping up to ~80°C/min on heating (~70°C/min on cooling)
Process gas delivery controlled by rotameter or MFC, optional vacuum operation