This device is a high powered microscope used for the examination and inspection of wafers. This microscope can provide darkfield illumination for examining surfaces of different reflectances. An additional feature is differential interface contrast, which displays height differences in high contrast. A CCD digital camera allows real time video of the sample to be displayed on a monitor and when required a high-resolution capture of the image can be outputted as a photo.
Additional microscopes with lens-sample distances of more than 5 cm are available as well.