Zentrum für Mikro-
und Nanostrukturen
Technische Universität Wien

::: Floragasse 7, A-1040 Wien, Austria :::
Tel ++43 1 58801 36200, Fax ++43 1 58801 36299

Vorstand: Univ. Prof. Dr. Gottfried Strasser
Techn. Leiter: Dr. W. Schrenk
Sekretariat: C. Brendt

The Center for Micro- and Nanostructures (ZMNS) is utilized for both research and instructional purposes. It provides a state-of-the art environment for teaching the fundamental techniques used to fabricate new semiconductor devices. The main goal of the research and development activities is the transfer of innovative ideas from basic science to device concepts. A close collaboration with the industry and international research institutions is maintained to stimulate new product ideas for microelectronic and optoelectronic applications. The Center houses a wide range of processing, material growing, and test equipment. As such, it is of tremendous value to a wide range of disciplines, and a basic unit for industrial and research activities in Austria.

Electron Beam
Lithography System