Cleanroom

The cleanroom facility of the ZMNS was installed in 1994 and operates to class 10,000 (90 m2) and class 100 (130 m2) conditions. The class figures indicate the number of particles smaller than 0.5 microns per cubic foot of air. The air is washed and filtered to guarantee the low number of particles. The temperature is controlled to 23 °C and humidity is kept below 9 g/m3.

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Atomic Force Microscope Info...
Bonder Info...
Dektak Profilometer Info...
CVD Reactor Info...
Electron Beam Lithography Info...
Ellipsometer Info...
EV Aligner Info...
Focused Ion Beam System Info...
Mask Aligner Info...
Metalization Info...
Molecular Beam Epitaxy Info...
Microscope Info...
Plasma Enhanced Chemical Vapor Deposition Info...
Reactive Ion Etching Info...
Spinner Info...
Scanning Electron Microscope Info...
Sputter System Info...
Rapid Thermal Process System Info...
Spray Coater Info...
Wafer Bonder Info...
X-Ray Diffractometer Info...