The cleanroom facility of the ZMNS was installed in 1994 and operates to class 10,000 (90 m2) and class 100 (130 m2) conditions. The class figures indicate the number of particles smaller than 0.5 microns per cubic foot of air. The air is washed and filtered to guarantee the low number of particles. The temperature is controlled to 23 °C and humidity is kept below 9 g/m3.
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